四氟化硅

pro_cas
7783-61-1
pro_cdbregno
CCD00026503
pro_formula
F4 Si
pro_molWeight
104.078

basic_info

Product_Name: 四氟化硅
CAS: 7783-61-1
中文同义词: 四氟化硅
EnglishSynonyms: SILICON TETRAFLUORIDE ; SILICIUM TETRAFLUORIDE ; TETRAFLUOROSILANE ; SILICON(IV)FLUORIDE
pro_mdlNumber: MFCD00040533
pro_acceptors: 0
pro_donors: 0
pro_smile: F[Si](F)(F)F
InChi: InChI=1S/F4Si/c1-5(2,3)4
InChiKey: InChIKey=ABTOQLMXBSRXSM-UHFFFAOYSA-N

property

MeltingPoint: -90 DEG C(LIT)
Boiling_Point: -86 DEG C(LIT)
Density: 3.57g/mLat25°C(lit.)
PhysicalProperty: TRANSITION TEMPERATURE: CRITICAL TEMPERATURE -14.2 DEG C
Comments: APPLICATION: SILICON TETRAFLUORIDE IS USED IN ION-IMPLANTATION PROCESSES AND AS A PRECURSOR TO FLUORINATED SILICA VIA PLASMA-ASSISTED CVD. MIXTURES OF SIF4-SIH4-H2 HAVE RECENTLY BEEN USED TO DEPOSIT POLYCRYSTALLINE SILICON THIN FILMS VIA REMOTE PLASMA CHEMICAL VAPOR DEPOSITION (RPCVD) SUCH FLUORINATED THIN FILMS SHOW VISIBLE PHOTOLUMINESCENCE (PL) AT ROOM TEMPERATURE
IMPURITIES: <0.5 PPM CARBON MONOXIDE (CO)
IMPURITIES: <1 PPM ARGON AND OXYGEN (AR AND O2)
IMPURITIES: <1 PPM CARBON DIOXIDE (CO2)
IMPURITIES: <10 PPM METHANE (CH4)
IMPURITIES: <3 PPM NITROGEN (N2)
IMPURITIES: <50 PPM HYDROGEN FLUORIDE (HF)
RECOMMENDED PRODUCTS: MONEL CONTROL VALVES Z261793, Z261807 OR MONEL GAS REGULATORS Z405981, Z406007 ARE RECOMMENDED
RIDADR: UN 1859 2.3
RTECS: VW2327000
UNSPSC: 12142100
WGK: 3
Specification: ELECTRONIC GRADE

secure_info

secure_symbol: GHS05 GHS05 GHS06 GHS06
secure_signal_word: Danger
secure_risk_stmt: H300 +H310 + H330-H314
secure_cautionary_stmt: P260-P264-P280-P284-P301 + P310-P302 + P350
secure_damage_code: T+
secure_risk_disclosure_stmt: R:14-26/27/28-31-34
secure_security_stmt: S:23-26-36/37/39-45
secure_wgk_germany: 3