四氟化硅

CAS号
7783-61-1
CCD编号
CCD00026503
分子式
F4 Si
分子量
104.078

基本信息

产品名称: 四氟化硅
CAS: 7783-61-1
中文同义词: 四氟化硅
英文同义词: SILICON(IV)FLUORIDE ; TETRAFLUOROSILANE ; SILICON TETRAFLUORIDE ; SILICIUM TETRAFLUORIDE
MDL号: MFCD00040533
氢键受体数量: 0
氢键供体数量: 0
Smile: F[Si](F)(F)F
InChi: InChI=1S/F4Si/c1-5(2,3)4
InChiKey: InChIKey=ABTOQLMXBSRXSM-UHFFFAOYSA-N

性质

熔点: -90 DEG C(LIT)
沸点: -86 DEG C(LIT)
密度: 3.57g/mLat25°C(lit.)
物理性质: TRANSITION TEMPERATURE: CRITICAL TEMPERATURE -14.2 DEG C
注解: APPLICATION: SILICON TETRAFLUORIDE IS USED IN ION-IMPLANTATION PROCESSES AND AS A PRECURSOR TO FLUORINATED SILICA VIA PLASMA-ASSISTED CVD. MIXTURES OF SIF4-SIH4-H2 HAVE RECENTLY BEEN USED TO DEPOSIT POLYCRYSTALLINE SILICON THIN FILMS VIA REMOTE PLASMA CHEMICAL VAPOR DEPOSITION (RPCVD) SUCH FLUORINATED THIN FILMS SHOW VISIBLE PHOTOLUMINESCENCE (PL) AT ROOM TEMPERATURE
IMPURITIES: <0.5 PPM CARBON MONOXIDE (CO)
IMPURITIES: <1 PPM ARGON AND OXYGEN (AR AND O2)
IMPURITIES: <1 PPM CARBON DIOXIDE (CO2)
IMPURITIES: <10 PPM METHANE (CH4)
IMPURITIES: <3 PPM NITROGEN (N2)
IMPURITIES: <50 PPM HYDROGEN FLUORIDE (HF)
RECOMMENDED PRODUCTS: MONEL CONTROL VALVES Z261793, Z261807 OR MONEL GAS REGULATORS Z405981, Z406007 ARE RECOMMENDED
RIDADR: UN 1859 2.3
RTECS: VW2327000
UNSPSC: 12142100
WGK: 3
规格: ELECTRONIC GRADE

安全信息

符号: GHS05 GHS05 GHS06 GHS06
信号词: Danger
危险声明: H300 +H310 + H330-H314
警示性声明: P260-P264-P280-P284-P301 + P310-P302 + P350
危害码: T+
风险声明: R:14-26/27/28-31-34
安全声明: S:23-26-36/37/39-45
WGK德国: 3